Following
is a list of references for additional information on femtosecond
micromachining.
F.
Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S.
Nolte, M. Will, J.-P. Ruske, B. N. Chichkov, A. Tünnermann,
"Sub-diffraction limited structuring of solid targets
with femtosecond laser pulses," Optics Express. 7, 41-49
(2000).
H.
K. Tönshoff, C. Momma, A. Ostendorf, S. Nolte, G. Kamlage,
"Microdrilling of metals with ultrashort laser pulses,"
Jour. of Laser Applic. 12, 23-27 (2000).
X.
Chen, X. Liu, "Short pulsed laser machining: How short
is short enough?" Jour. of Laser Applic. 11, 268-272
(1999).
M.
Mendes, V. Oliveira, R. Vilar, F. Beinhorn, J. Ihlemann, O.
Conde, "Femtosecond ultraviolet laser micromachining
of Al2O3-TiC ceramics," Jour. of Laser Applic. 11, 211-215
(1999).
S.
Nolte, G. Kamlage, T. Bauer, F. Korte, C. Fallnich, A. Ostendorf,
F. van Alvensleben, Laser Zentrum Hannover e.V., "Microstructuring
with femtosecond lasers," WLT, 15, 2.1 (1999).
J.
Ihlemann, P. Simon, G. Marowsky, Laser-Laboratorium Göttingen
e.V, "Sub-µm-machining of metallic materials with
femtosecond excimer lasers," WLT, 15, 4.1 (1999).
S.
Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F.
von Alvensleben, H. Welling, "Polarization effects in
ultrashort-pulse laser drilling," Applied Physics A,
563 - 567 (1999).
H.
K. Tönshoff, A. Ostendorf, Hannover e.V., "Short
laser pulses for material processing=Niche or key technology?"
WLT, 15, 1.1 (1999).
J.-X.
Zhao, B. Hüttner, A. Menchig, "Micromachining with
Ultrashort Laser Pulses," SPIE 3618, 1-8 (1999).
S.
Nolte, B.N. Chichkov, H. Welling, "Nanostructuring with
spatially localized femtosecond laser pulses," Optics
Letters, 24, 914-916 (1999).
J.
Staud, W. Groß, A. Menschig, "Miniaturized Sensitive
Tools for Automation of Micro-Assembly," Institut für
Technische Physik, Pfffenwaldring 38-40, Stuttgart, Germany,
Reprint from OPTO'98 Proceedings, Erfurt 1998 M. Lenzner,
J. Krüger, S. Sartania, Z. Cheng, Sh. Spielmann, G. Mourou,
W. Kautek, F. Krausz, "Femtosecond optical breakdown
in Dielectrics," Physical Review Letters, 89, 4076 -
4079, (1998).
B.C.
Stuart, P.S. Banks, M. D. Perry, M.D. Feit, R.S. Lee, F. Roeske,
J.P. Armstrong, H.T. Nguyen, J. A. Sefcik, "Femtosecond
Laser Materials Processing," SPIE, 3269, 57-65, (1998).
M.D.
Shirk, P.A. Molian, "A review of ultrashort pulsed laser
ablation of materials," Jour. of Laser Applic., 10, 18-28,
(1998).
R.
Bähnisch, W. Groß, J. Staud, A Menschig, "Femtosecond
laser based technology for fast development of micromechanical
devices," Sensors and Actuators A," E-MRS (1998).
B,
Craig, "Ultrafast pulses promise better processing of
fine structures," Laser Focus World, Sept, 79-88, (1998).
C.
Momma, S. Nolte, G. Kamlage, F. von Alvensleben, A. Tünnermann,
"Beam delivery of femtosecond laser radiation by diffractive
optical elements," Appl. Phys. A 76, 517-520 (1998).
T.-H.
Her, R. J. Finlay, C. Wu, S. Deliwala, E. Mazur, "Microstructuring
of silicon with femtosecond laser pulses," Appl. Phys.
Let., 73, 1673-1675 (1998).
P.B.
Corkum, "Femtosecond lasers and their implications for
materials processing," SPIE, 3274, 10-17 (1998).
A.M.
Rubenshik, M.D. Feit, M.D. Perry, J.T. Larson, "Numerical
simulation of ultra-short laser pulse energy deposition and
bulk transport for materials processing," Elsevier, Applied
Surface Science, 127-129 (1990) 193-198.
M.D.
Feit, A.M. Rubenshik, B.-M. Kim, L.B. da Silva, M.D. Perry,
"Physical Characterization of ultrashort laser pulse
drilling of biological tissue," Elsevier, Applied Surface
Science, 127-129 (1998) 869-874.
S.
Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, W. Weaver, H.
Champoux, "Femtosecond laser microstructuring of materials,"
Elsevier, Applied Surface Science, 127-129 (1998) 875-880.
A.
Rosenfeld, D. Ashendasi, H. Varel, M. Wähmer, E.E.B.
Campbell, "Time resolved detection of particle removal
from dielectrics on femtosecond laser ablation," Elsevier,
Applied Surface Science 127-129 (1998) 76-80.
H.
Varel, M. Wähmer, A. Rosenfeld, D. Ashendasi, E.E.B.
Campbell, "Femtosecond laser ablation of sapphire: time-of-flight
analysis of ablation plume," Elsevier, Applied Surface
Science 127-129 (1998) 128-133.
W.
Kautek, S. Pentzien, P. Rudolph, J. Krüger, E. König,
"Laser interaction with coated collagen and cellulose
fibre composites: fundamentals of laser cleaning of ancient
parchment manuscripts and paper," Elsevier, Applied Surface
Science 127-129 (1998) 746-754.
A.
Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, D. von der
Linde, "Femtosecond laser ablation of gallium arsenide
investigated with time-of-flight mass spectroscopy,"
Elsevier, Appl. Phys. Let., 72, 2385-2387, (1998).
P.A.
VanRompay, M. Nantel, P.P. Pronko, "Pulse-contrast effects
on energy distributions of C1+ to C4+ ions for high-intensity
100-fs laser-ablation plasmas," Elsevier, Applied Surface
Science 127-129 (1998) 1023-1028
T.
von Woedtke, P. Abel, J. Krüger, W. Kautek, "Subpicosecond
pulse laser microstructuring for enhanced reproducibility
of biosensors," Elsevier, Sensors and Actuators B 42
(1997) 151-156.
X.
Liu, D. Du, A.-C. Tien, G. Mourou, "Laser micromachining
with ultrafast lasers," Center for Ultrafast Optical
Science, The University of Michigan. X. Liu, D. Du, G. Mourou,
"Laser Ablation and micromachining with ultrashort laser
pulses," IEEE Jour. of Quantum Electronics, 33, 1706-1716
(1997).
P.
Dainesi, J. Ihlemann, P. Simon, "Optimization of a beam
delivery system for a short-pulse KrF laser used for material
ablation," Appl. Optics, 35, 7080-7085 (1997).
X.
Liu, G. Mourou, "Ultrashort laser pulses tackle precision
machining," Laser Focus World, August (1997). J. Zhao,
R. Bähnisch, W. Groß, H. Hüttner, A. Menschig,
"Micromachining with ultrashort laser pulses," Deutsches
Sentrus für Luft - und Raumfahrt e.V. - German Aerospace
Center, (1999).
A.
Luft, U. Franz, A Emsermann, J. Kaspar, "A study of thermal
and mechanical effects on materials induced by pulsed laser
drilling," Applied Physics A 63, 93 - 101 (1996).
J.
Krüger, W. Kautek, "Femtosecond pulse visible laser
processing of fibre composite materials," Elsevier, Applied
Surface Science 106 (1996) 383-389.
P.P.
Pronko, P.A. VanRompay, R.K. Signh, F. Qian, D.Du, X. Liu,
"Laser induced avalanche ionization and electron-lattice
heating of silicon with intense near IR femtosecond pulses,"
Mat Res. Soc. Symp. Proc., Vol 397, 45-51, (1996).
P.
Simon, J. Ihlemann, "Machining of submicro structures
on metals and semiconductors by ultrashort UV-laser pulses,"
Appl. Phys. A 63, 505-508 (1996).
K
Lewotsky, "Femtosecond laser can machine micron holes,"
Laser Focus World, Jan., 22-24, (1996).
P.P.
Pronko, S.K. Dutta, D. Du, R.K. Singh, "Thermophysical
effects in laser processing of materials with Picosecond and
Femtosecond pulses," J. Appl. Phys. 78 (10) 15 Nov. 6233-6240
(1995).
W.
Kautek, J. Krüger, "Femtosecond-Pulse laser Microstructuring
of Semiconducting Materials," Materials Science Forum
v.173-174, 17-22, (1995).
J.
Krüger, W. Kautek, "Femtosecond-pulse laser processing
of metallic and semiconducting thin films," SPIE 2403,
236-447, (1995).
S.
Preuss, M. Stuke, "Subpicosecond ultraviolet laser ablation
of diamond: Nonlinear properties at 248nm and time-resolved
characterization of ablation dynamics," Appl. Phys. Lett.,
76, 338-340, (1995).
P.P.
Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou,
"Machining of sub-micron holes using a femtosecond laser
at 800 nm," Elsevier, Optics Communications 114, 106-110,
(1995).
W.
Kautek, J. Krüger, "Femtosecond pulse laser ablation
of metallic, semiconducting, ceramic, and biological materials,"
SPIE, 2207, 600-611, (1994).
S.
Preuß, M. Späth, M. Stuke, "Time Resolved
Laser Ablation of Polymers and Inorganic Crystals," Elsevier,
Microelectronic Engineering 25, 313-320 (1994).
A.
Smirl, I. Boyd, T. Boggess, S. Moss, H. van Driel, "Structural
changes produced in silicon by intense 1-µm ps pulses,"
J. Appl Phys. 60 1169-1182 (1986).
B.K.A.
Ngoi, K. Venkatakrishnan, L.E.N. Lim, B. Tan, "Submicron
micromachining on silicon wafer using femtosecond pulse laser,"
Jour. of Laser Applications 13, 41-43 (2001).
H.
K. Tönshoff, Ostendorf, K. Körber, T. Wagner, "Micromachining
of Semiconductors with Femtosecond Lasers," Published
on Proceedings of ICALEO 2000, Dearborn (USA). A. Macrinkevicius,
S. Juodkazis, "Femtosecond laser-assisted three-dimensional
microfabrication in silica," Opt. Lett. 26, 227-279 (2001).
Y.
Kondo, J Qiu, T Mitsuyu, K. Hirao, T. Yoko, "Three-Dimensional
microdrilling of glass by multiphoton process and chemical
etching."
